Scanner apparatus having electromagnetic radiation devices coupled to MEMS actuators

ABSTRACT

A disclosed optical scanner apparatus can include a member having spaced apart proximal and distal portions. An optical scanning device can be configured to direct optical radiation, which is moveably coupled to the proximal portion of the member and can be configured to rotate in a plane of movement to a first position to direct the optical radiation along a first path and can be configured to rotate in the plane of movement to a second position to direct the optical radiation along a second path. A MicroElectroMechanical Systems (MEMS) actuator can be coupled to the optical scanning device, where the MEMS actuator can be configured to move in a first direction to move the optical scanning device to the first position and can be configured to move in a second direction to move the optical scanning device to the second position. The MEMS actuator can have proximal and distal portions, where the distal portion of the MEMS actuator is coupled to the proximal portion of the member and the proximal portion of the MEMS actuator is coupled to the optical scanning device. Other scanner apparatus are disclosed.

CLAIM FOR PRIORITY

The present application claims the benefit of priority as a continuationof U.S. application Ser. No. 12/170,828 filed Jul. 10, 2008, now U.SPat. No. 7,706,039 which claims the benefit of priority as a divisionalof U.S. application Ser. No. 10/380,791, filed Oct. 22, 2003, now U.S.Pat. No. 7,420,724, which is a 371 Application of PCT/US01/28765; filedSep. 14, 2001 which claims the benefit of and priority to U.S.Provisional Application No. 60/233,262, filed on Sep. 18, 2000. Thedisclosures of each of the above-referenced applications areincorporated herein in their entirety by reference.

STATEMENT OF GOVERNMENT SUPPORT

This invention was made with U.S. Government support under grant numberHL-58754 from the National Institute of Health. The U.S. Government hascertain rights to this invention

FIELD OF THE INVENTION

The present invention relates to scanner devices in general, and moreparticularly, to electromagnetic radiation scanner devices.

BACKGROUND OF THE INVENTION

It is known in some industrial, medical, and consumer applications toscan objects. For example, U.S. Pat. No. 5,321,501 to Swanson et al.entitled Method and Apparatus for Optical Imaging with Means forControlling the Longitudinal Range of the Sample, describes an assemblythat scans angularly and transversely as shown in FIGS. 4A and 4Btherein. As discussed in Swanson, the mechanism (107) that provides thescanning motion can be a piezoelectric crystal, a stepper motor, anelectromagnetic actuator, or an electrostatic actuator. Some of thesescanning mechanisms may have control problems. For example, theoscillatory response of a piezoelectric crystal may suffer fromhysteresis. Stepper motors can be large and consume significant power.Electromagnetic actuators may not be easily made in small sizes.

Scanners may also be utilized in biomedical areas. Some applications inthe biomedical area include corneal resurfacing, optical imaging, andhair and tattoo removal. It is known to use galvanometers and otherresonant scanners to steer optical beams in these types of biomedicalapplications. While galvanometers may offer a range of scan speeds andscan angles, galvanometers may require large magnetic bases and minorshaving relatively large masses to achieve desirable performancecharacteristics. It is also known to fabricate scanners on siliconwafers using polysilicon as a substrate. It is also known to useelectrostatic forces (amplified using comb drives), magnetic fields,thermal bending of bimorph cantilevers, and piezoelectric actuation tomove mirrors in such scanners. These scanners can produce optical scanangles of about 7 to 180 degrees at frequencies from 40 Hz to 34 kHzusing voltages in a range from 20 volts to 171 volts.

SUMMARY OF THE INVENTION

Embodiments according to the present invention can provide scannerdevices. Pursuant to these embodiments, an optical scanner apparatus caninclude a member having spaced apart proximal and distal portions. Anoptical scanning device can be configured to direct optical radiation,which is moveably coupled to the proximal portion of the member and canbe configured to rotate in a plane of movement to a first position todirect the optical radiation along a first path and can be configured torotate in the plane of movement to a second position to direct theoptical radiation along a second path. A MicroElectroMechanical Systems(MEMS) actuator can be coupled to the optical scanning device, where theMEMS actuator can be configured to move in a first direction to move theoptical scanning device to the first position and can be configured tomove in a second direction to move the optical scanning device to thesecond position. The MEMS actuator can have proximal and distalportions, where the distal portion of the MEMS actuator is coupled tothe proximal portion of the member and the proximal portion of the MEMSactuator is coupled to the optical scanning device.

In some embodiments according to the invention, a scanner apparatus caninclude a member that has spaced apart proximal and distal portions. Anelectromagnetic radiation device can be moveably coupled to the proximalportion of the member, and can be configured to rotate about theproximal portion of the member more than about 45 degrees to directelectromagnetic radiation. A MicroElectroMechanical Systems (MEMS)actuator can be coupled to the electromagnetic radiation device, wherethe MEMS actuator can be configured to move in a first direction to movethe electromagnetic radiation device to a first position and can beconfigured to move in a second direction to move the electromagneticradiation device to a second position to define an angle with the firstposition of greater than about 45 degrees.

In some embodiments according to the invention, a scanner apparatus caninclude a member that has spaced apart proximal and distal portions. Anelectromagnetic radiation device can be configured to directelectromagnetic radiation, which is moveably coupled to the member andcan be configured to move in a first plane of movement to a firstposition to direct the electromagnetic radiation along a first path andcan be configured to move in the plane of movement to a second positionto direct the electromagnetic radiation along a second path;

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1 to 4 are schematic diagrams that illustrate scanner devicesaccording to embodiments of the present invention.

FIGS. 5 a and 5 c are schematic diagrams that illustrate integratedforce array actuators in a relaxed state and in a contacted staterespectively.

FIGS. 5 b and 5 d are perspective views that illustrate single cells ofan integrated force array actuator in a relaxed state and in acontracted state respectively.

FIGS. 6 a and 6 b are schematic diagrams that illustrate electromagneticradiation devices, frames, and integrated force array actuatorsaccording to embodiments of the present invention.

FIG. 7 is a perspective view that illustrates electromagnetic radiationdevices configured to pivot in two planes of movement according toembodiments of the present invention.

FIG. 8 is a schematic diagram that illustrates optical barcode scannersaccording to embodiments of the present invention.

FIG. 9 is a graph that illustrates optical angular displacement as afunction of voltage according to embodiments of the present invention.

FIG. 10 is a graph that illustrates optical angular displacement as afunction of frequency according to embodiments of the present invention.

FIG. 11A is an exemplary barcode scanned by an optical bar code scanneraccording to embodiments of the present invention.

FIG. 11B is a graph of a signal produced by an optical bar code scannerscanning the barcode of FIG. 11A according to embodiments of the presentinvention.

FIG. 12 is a schematic diagram that illustrates optical scanner systemsaccording to embodiments of the present invention.

FIG. 13 is a schematic diagram that illustrates optical scanner systemsaccording to embodiments of the present invention.

FIG. 14 is a schematic diagram that illustrates confocal microscopesystems according to embodiments of the present invention.

FIG. 15 is a schematic diagram that illustrates optical coherencetomography systems according to embodiments of the present invention.

FIG. 16 is a schematic diagram that illustrates hair/tattoo removalsystems according to embodiments of the present invention.

FIG. 17 is a schematic diagram that illustrates corneal resurfacingsystems according to embodiments of the present invention.

FIG. 18 is a schematic diagram that illustrates optical image projectionsystems according to embodiments of the present invention.

FIG. 19 is a schematic diagram that illustrates two dimensional opticaltext scanners according to embodiments of the present invention.

FIG. 20 is a schematic diagram that illustrates combined optical/2Dultrasound imaging system according to embodiments of the presentinvention.

FIG. 21 is a schematic diagram that illustrates combinedoptical/ultrasound scanning catheters according to embodiments of thepresent invention.

FIG. 22 is a schematic diagram that illustrates scanner devicesaccording to embodiments of the present invention.

FIGS. 23 to 26 are cross-sectional views that illustrate electromagneticradiation devices according to embodiments of the present invention.

FIGS. 27 to 30 are schematic diagrams that illustrate pivoting membersaccording to embodiments of the present invention.

DETAILED DESCRIPTION OF EMBODIMENTS ACCORDING TO THE INVENTION

The invention now will be described more fully hereinafter withreference to the accompanying drawings, in which embodiments of theinvention are shown. The invention may, however, be embodied in manydifferent forms and should not be construed as limited to theembodiments set forth herein; rather, the embodiments are provided sothat this disclosure will be thorough and complete, and will fullyconvey the scope of the invention to those skilled in the art. Likenumbers refer to like elements throughout.

It will be understood that when an element such as a layer, region orsubstrate is described as being “on” another element, it can be directlyon the other element or intervening elements may also be present Incontrast, when an element is described as being “directly on” anotherelement, there are no intervening elements present. It will also beunderstood that when an element such as a member, frame, hinge,electromagnetic radiation device, or MicroElectroMechanical Systems(MEMS) actuator is described as being “coupled to” another element, itcan be directly coupled to the other element or intervening elements mayalso be present.

As used herein, the term “electromagnetic radiation’ can includeradiation that can be used to transmit or direct information in asystem, such as radiation in the visible, ultraviolet, infrared and/orother portions of the electromagnetic radiation spectrum. The power ofthe electromagnetic radiation can vary based on the application. Forexample, some embodiments according to the present invention userelatively high power lasers to generate the electromagnetic radiation.

As used herein the term “electromagnetic radiation device” can includeany device which is capable of providing electromagnetic radiationtherefrom, such as a reflector or mirror, or a device which generateselectromagnetic radiation, such as a camera, or a device that allowselectromagnetic radiation to pass therethrough, such as a lens or thelike. Accordingly, it will be understood that the electromagneticradiation devices described herein do not necessarily generate theelectromagnetic radiation, but can instead reflect, focus, or otherwisedirect the electromagnetic radiation along different paths to achieve aresult, such as to direct information or therapy.

As used herein the term “hinge” is defined to mean a device that allowstwo elements, coupled thereto, to pivot in a plane of movement. Forexample, in some embodiments according to the present invention, thehinge can be a flexible material, an end of which may move in adirection in which an element coupled thereto is pivoted. The hinge canallow repeated pivoting of the elements over an extended duration.

FIG. 1 is a schematic diagram that illustrates scanner devices accordingto embodiments of the present invention. A proximal portion of a member110 is movably coupled to a first portion of an electromagneticradiation device 100 by a hinge 125. In some embodiments according tothe present invention, the member 110 is made from a polyimide material.An integrated force array actuator (IFA) 105 is coupled to theelectromagnetic radiation device 100 at a second portion thereof that isspaced apart from the first portion. The IFA 105 is configured to expandand contract, in directions 115 a and 115 b respectively, to pivot theelectromagnetic radiation device 100 in a plane of movement 120 aboutthe hinge 125.

The IFA 105 can be used to pivot the electromagnetic radiation device100 about the hinge 125 to direct electromagnetic radiation 117 incidentthereon along different paths. For example, when the IFA 105 contractsin the direction 115 b, the electromagnetic radiation device 100 pivotsin the plane of movement 120 to a first position 101 a to reflect theelectromagnetic radiation 117 from a source 118 along a first path 106a. When the IFA 105 expands in the second direction 115 a, theelectromagnetic radiation device 100 pivots on the binge 125 in theplane of movement 120 to a second position 101 b to reflect theelectromagnetic radiation 117 along a second path 106 b. Accordingly,embodiments of scanner devices according to the present invention can beused to scan electromagnetic radiation in the plane of movement 120.

In some embodiments according to the present invention, the IFA 105 ismovably coupled to the electromagnetic radiation device 100 by a secondhinge (not shown) so that the expansion and contraction of the IFA 105can be translated into the plane of movement 120. In some embodimentsaccording to the present invention, the electromagnetic radiation 117defines a different angle with the electromagnetic radiation device 100than the one shown in FIG. 1.

FIG. 2 is a schematic diagram that illustrates scanner devices accordingto embodiments of the present invention. As shown in FIG. 2, a distalend of an IFA 205 is coupled to a distal portion 211 b of a member 210and a proximal end of the IEA 205 is coupled to an electromagneticradiation device 200. The electromagnetic radiation device 200 ismoveably coupled to a proximal portion 211 a of the member 210 via ahinge 225. The IFA 205 is configured to expand and contract in first andsecond directions 215 a and 215 b to pivot the electromagnetic radiationdevice 200 in a plane of movement 220 about the hinge 225 to directelectromagnetic radiation incident thereon along different paths.

FIG. 3 is a schematic diagram that illustrates scanner devices accordingto embodiments of the present invention. As shown in FIG. 3, an IFA 305is connected to a proximal portion of a member 310 and to anelectromagnetic device 300. The IFA 305 is configured to expand andcontract in first and second directions 315 a, 315 b to pivot theelectromagnetic radiation device 300 in a plane of movement 320 about ahinge 325 that moveably couples the electromagnetic radiation device 300to the proximal portion of the member 310 to direct electromagneticradiation along different paths. As shown in FIG. 3, the points wherethe IFA 305 and the hinge 325 are coupled to the electromagneticradiation device 300 are spaced apart from one another.

FIG. 4 is a schematic diagram that illustrates embodiments of scannerdevices according to the present invention. As shown in FIG. 4, thepoints where an IFA 405 and a hinge 425 are coupled to anelectromagnetic radiation device 400 can be spaced closer together incomparison to those shown in FIG. 3. A member 410 is moveably coupled tothe electromagnetic radiation device 400 by the hinge 425. A distal endof the IFA 405 is coupled to a proximal portion of the member 400. TheIFA 405 is configured to expand and contract in directions 415 a and 415b respectively to pivot the electromagnetic radiation device 400 in aplane of movement 420 about the hinge 425 to direct electromagneticradiation along different paths.

In some embodiments according to the present invention, the IFAs areMEMS based actuators such as those disclosed in U.S. Pat. No. 5,206,557to Bobbio entitled Microelectromechanical Transducer and FabricationMethod, the disclosure of which is hereby incorporated herein byreference. As discussed in Bobbio, an IFA is a network of micron-scaleddeformable capacitive cells that include capacitor electrodes. Thecapacitive cells can contract due to an electrostatic force produced bya differential voltage applied across the capacitor electrodes. Theelectrostatic force produced by a capacitive cell with polyamideelectrodes and a dielectric of air is given as follows:

$\begin{matrix}{F = \frac{ɛ\;{AV}^{2}}{1.2\; L^{2}}} & (1)\end{matrix}$where F is the electrostatic force produced, A is the surface area ofthe capacitor plate, V is the applied voltage, ∈ is the dielectricconstant of air, and L is the capacitor electrode separation.

As shown in FIGS. 5A and 5B, when the capacitive cells are in a relaxedstate, the spacing between the plates of the capacitive cells are at afirst distance. As shown in FIGS. 5C and 5D, when a voltage is appliedacross the plates of the capacitive cells, the plates are deformed bythe electrostatic force between the plates, thereby causing the IFA tocontract along its length. Accordingly, when a voltage is applied to theIFA, the IFA contracts to reduce its length compared to when the IFA isin the relaxed state.

It will be understood that other types of MEMS actuators can be used.For example, in some embodiments according to the present invention, aThermal Arched Beam (TAB) actuator is used to pivot the electromagneticradiation device about the hinge. TABs are further described in U.S.Pat. No. 5,909,078 entitled Thermal Arched Beam MicroeletromechantcalActuators to Wood et al., the disclosure of which is hereby incorporatedherein by reference.

FIG. 6A is a perspective view that illustrates embodiments of anelectromagnetic radiation device 600. A member 610 is coupled to a framehaving first and second opposing portions 630 a-b. The first opposingportion of the frame 630 a is moveably coupled to the electromagneticradiation device 600 by a first hinge 625 a. The second opposing portionof the frame 630 b is moveably coupled to the electromagnetic radiationdevice 600 by a second binge 625 b. The first and second hinges 625 a-bdefine an axis 629 therethrough. Although the frames are shown indepicted as rectangular square in the figures, it will be understoodthat other shapes, such as circular or elliptical, may be used for theframes.

An IFA 605 is coupled to a point on the electromagnetic radiation device600 which is spaced apart from the axis 629 and is configured to expandand contract in directions 615 a and 615 b respectively to pivot theelectromagnetic radiation device 600 in a plane of movement 620 aboutthe axis 629. Accordingly, the IFA 605 can be used to directelectromagnetic radiation therefrom along different paths. FIG. 6B is atop view of the electromagnetic device 600 shown in FIG. 6A.

In some embodiments according to the present invention, the hinges canbe torsion type hinges having a rectangular shape that are configured tobe subjected to a twisting torque applied by the expansion andcontraction of the IFA coupled to the electromagnetic radiation device.In some embodiments according to the present invention, the hinges havedimensions of approximately 60 microns by 250 microns by about 3 micronsthick. In some embodiments according to the present invention, thehinges are made of polyimide. The angular displacement of the hinges canbe approximated by the following formulas:

$\begin{matrix}{{\Theta(l)} = {\frac{Tl}{2\left( {1 - \mu} \right){Dc}}\left( \frac{\tanh\left( {4\;\lambda} \right)}{4\;\lambda} \right)}} & (2) \\{\lambda = {\frac{l}{c}\sqrt{1.5\left( {1 - \mu} \right.}}} & (3) \\{D = \frac{{Eh}^{3}}{12\left( {1 - \mu^{2}} \right)}} & (4)\end{matrix}$in Equation (2) λ is an aspect ratio parameter that is provided byEquation (3) in which l is the length of the hinge which can be, forexample, 250 microns, c is the hinge width which can be, for example, 60microns, μ is Poisson's ratio for polyimide which is about 0.34, D is alocal flexion stiffness that is described by Equation (4), where E isthe elastic modulus of polyimide, which can be about 2600 Mpa, and h isthe hinge thickness which can be about 3 microns.

The angular displacement determined using Equation (2) can be used todetermine a torsion constant that can be used to relate the appliedmoment to an angular displacement. The torsion constant, k, can be usedto determine the resonant frequencies of the structure in air using thefollowing equation

$\begin{matrix}{f = {\frac{1}{2\;\pi}\sqrt{\frac{k}{l}}}} & (5)\end{matrix}$

FIG. 7 is a perspective view that illustrates embodiments of anelectromagnetic radiation 700 device in a Cardano type suspensionaccording to the present invention. As shown in FIG. 7, a first frameincludes first and second opposing portions 730 a, 730 b that arecoupled to a member 710. First and second hinges 725 a, 725 b arecoupled to the first and second opposing portions of the frame 730 a,730 b and define a first axis 727 there through. A second frame islocated in an interior portion of the first frame and includes first andsecond opposing portions 740 a, 740 b. A third hinge 745 a is coupled tothe first opposing portion 740 b of the second frame and a fourth hinge745 b is coupled to the second opposing portion 740 a of the secondframe. The third and fourth hinges 745 a-b moveably couple the secondframe to the electromagnetic radiation device 700 located in theinterior region of the second frame. The third and fourth hinges 745 a-bdefine a second axis 747 therethrough about which the electromagneticradiation device 700 pivots. The electromagnetic radiation device 700also pivots about the first axis 727. In particular, a first IFA 705 ais coupled to the second frame and is configured to expand and contractto pivot the second frame and the electromagnetic radiation device 700about the first axis 727. A second IFA 705 b is coupled to theelectromagnetic radiation device 700 and is configured to pivot theelectromagnetic radiation device 700 about the second axis 747.Accordingly, the first and second IFAs 705 a-b pivot the electromagneticradiation device 700 in two planes of movement, the first plane ofmovement being about the first axis 727, and the second plane ofmovement being about the second axis 747.

As discussed above, embodiments of electromagnetic radiation devicesaccording to the present invention can direct electromagnetic radiationalong different paths, generate electromagnetic radiation, focus theelectromagnetic radiation, and the like. For example, in embodimentsaccording to the present invention having electromagnetic radiationdevices that reflect electromagnetic radiation, the electromagneticradiation device can be a reflector or mirror. The reflector can be madea metal such as gold.

For example, FIG. 8 is a schematic diagram that illustrates scanningdevices including reflectors according to embodiments of the presentinvention. In particular, the reflector can be used as part of anoptical barcode scanner wherein a helium neon laser 850 projects laserlight onto a reflector 800. The reflector 800 is moveably coupled to amember 810 by at least one hinge which is not shown. The reflector 800is configured to pivot about the at least one hinge in a plane ofmovement 820. A distal end of an IFA 805 is coupled to a distal end ofthe member 810. A proximal end of the IFA 805 is coupled to thereflector 800. The IFA 805 is configured to contract and expand indirections 815 a and 815 b respectively to pivot the reflector 800 inthe plane of movement 820 to scan the electromagnetic radiation across abarcode 840 which is reflected to a photo detector 845. The photodetector 845 can determine the configuration of the barcode 840 based onthe reflected energy therefrom.

In further embodiments according to the present inventionelectromagnetic radiation can be used to scan a body to assist in thediagnosis of skin conditions, such as skin cancer. In other embodimentsaccording to the present invention, electromagnetic radiation can beused to scan a body to provide body dimensions for the sizing ofgarments. In other embodiments according to the present invention,electromagnetic radiation can be used to direct light for light displaysor light shows.

FIG. 9 is an exemplary graph that illustrates optical angulardisplacement as a function of the voltage applied to an IFA according tothe present invention. In particular, as the voltage increases, theangle over which the reflector is displaced increases. FIG. 10 is anexemplary graph that illustrates angular displacement as a function of afrequency associated with the voltage applied to the IFA. In particular,FIG. 10 shows that, according to some embodiments of the presentinvention, pronounced angular displacement can be achieved near aresonant frequency associated with the system, FIG. 10 also shows thatresonance can be achieved at about 60 Hz while lesser displacements canbe achieved at near a resonant frequency of about 30 Hz.

FIG. 11A is an exemplary barcode scanned by the optical barcode scanningsystem illustrated in FIG. 8. FIG. 11A is an exemplary graph thatillustrates a response of the photo detector 845 based on the laserlight scanned across the barcode in FIG. 11A. As shown iii FIG. 11A,localized peaks of the voltage signal can be associated with lighterareas of the barcode where increased laser light is received by thephotodetector 845. Conversely, the localized minima of the voltagesignal can be associated with the dark bands in the exemplary barcode ofFIG. 11A.

FIG. 12 is a schematic diagram that illustrates optical scanning systemsaccording to embodiments of the present invention, In particular, anelectromagnetic radiation source 1250 directs electromagnetic radiation1204 to a first reflector 1201 which reflects that electromagneticradiation 1204 to a second reflector 1200 according to the presentinvention. The second reflector 1200 is coupled to an IFA 1205 that isconfigured to expand and contract to pivot the second reflector 1200 toreflect the electromagnetic radiation through a lens 1214 which focusesthe electromagnetic radiation onto a sample 1216.

FIG. 13 is a schematic diagram that illustrates optical scanning systemsaccording to embodiments of the present invention. In particular, anelectromagnetic radiation source 1350 generates electromagneticradiation 1304 which is reflected by a first reflector 1301 to a secondreflector 1300. The second reflector 1300 is coupled to an IFA 1305which is configured to pivot the second reflector 1300 about a hinge(which is not shown) to reflect the electromagnetic radiation to a lens1314, The lens is coupled to a second IFA 1315 that is configured tomove the lens 1314 towards and away from the second reflector 1300. Thelens 1314 moves to focus the electromagnetic radiation from the secondreflector 1300 onto a sample 1316.

FIG. 14 is a schematic diagram of a confocal microscope system accordingto the present invention. According to FIG. 14, the confocal microscopesystem can generate laser light which is reflected off a reflector 1400to a tissue sample. As discussed above, the reflector 1400 is pivotedabout hinges (not shown) by expansion and contraction of an IFA 1405that is coupled to the reflector 1400. A lens (not shown) can bepositioned along the path of the electromagnetic radiation to focus thelaser light. Accordingly, the confocal microscope system according tothe present invention shown in FIG. 14 can scan tissue to produce animage of a slice of the tissue.

FIG. 15 is a schematic diagram that illustrates optical coherencetomography systems (OCT) according to embodiments of the presentinvention. An OCT system is analogous to ultrasound in that lightincident on the tissue is reflected therefrom and can be used to createa tomographic image of the tissue. According to FIG. 15, infrared light1540 from an infrared light source 1530 is projected onto a reflector1500 according to the present invention. The infrared light 1540 isscanned across the tissue by pivoting the reflector 1500 using an IFA1505 as described above. The infrared light reflected from the tissuecan be sampled to create a tomographic image.

FIG. 16 is a schematic diagram that illustrates hair/tattoo removalsystems according to embodiments of the present invention, According toFIG. 16, an alexandrite laser 1650 projects light onto a reflector 1600according to the present invention. The reflector 1600 is pivoted abouta set of hinges (not shown) by the expanding and contracting an WA 1605that is coupled thereto to scan the hair or tattoo to be removed.

FIG. 17 is a schematic diagram that illustrates corneal resurfacingsystems according to embodiments of the present invention. According toFIG. 17, an ultraviolet radiation source 1750 generates ultravioletradiation which is reflected off a reflector 1700 onto a corneal surfaceof an eye 1701. The reflector 1700 pivots about a hinge (not shown) whenan IFA 1705 expands and contracts as discussed above. Scanning devicesaccording to the present invention can therefore be used to scanultraviolet radiation across a patient's eye to conduct laser eyesurgery or the like. For example, the ultraviolet radiation can heat andreshape the cornea of the patient's eye to correct near and farsightedness.

FIG. 18 is a schematic diagram that illustrates optical image systemsaccording to embodiments of the present invention. According to FIG. 18,image data is projected from an image source 1850 to a reflector 1800which reflects the image data onto a retina of a subject's eye 1801. Theimage is projected onto the retina by pivoting the reflector 1800 byexpanding and contracting an IFA 1805 coupled thereto as discussedabove.

FIG. 19 is a schematic diagram that illustrates text scanners accordingto embodiments of the present invention. According to FIG. 19, anelectromagnetic radiation source 1900 can be pivoted to scan text on apage 1901. For example, the scanning device of FIG. 19 can beimplemented in a text reading pen which a user drags across the text tobe scanned. In particular, the electromagnetic radiation source 1900 isconfigured to pivot out of plane relative to a direction in which thepen is dragged across the text. In further embodiments according to thepresent invention, the electromagnetic radiation source 1900 can bemounted in a Cardano type suspension, such as that discussed in relationto FIG. 7, so that the electromagnetic radiation source 1900 isconfigured to pivot in two dimensions to further reduce the time neededto scan text on the page 1901.

FIG. 20 is a schematic diagram that illustrates a combinedoptical/ultrasound scanner according to the present invention. Accordingto FIG. 20, an electromagnetic radiation source 2050 generateselectromagnetic radiation 2021 which is reflected off a reflector 2000onto a target 2001. An ultrasound transducer 2002 is mounted on thereflector 2000 and produces ultrasonic energy which can be used to scanthe target 2001. When the reflector 2000 is pivoted by an IFA 2005, theelectromagnetic radiation and the ultrasound energy can both be directedto the target 2001 thereby producing both imaging and ultrasound datacorresponding to the target 2001.

FIG. 21 is a schematic diagram that illustrates combined OCT/ultrasoundscanners in a catheter 2160. According to FIG. 21, a scanning device2100 according to embodiments of the present invention can be embeddedin the catheter 2160 and configured to scan tissue in which the catheteris placed by pivoting in response to expansion and contraction of an IFAconnected thereto as discussed above. The catheter 2160 also includes anultrasound array 2170 which can be used to scan the tissue in which thecatheter 2160 is inserted. In some embodiments according to the presentinvention, both the OCT scanner and the ultrasound transducer image intwo or three dimensions. In further embodiments according to the presentinvention, the OCT scanner and the ultrasound transducer are angledtowards each other in the catheter 2160 to scan the same area of tissue.For a two dimensional system, the OCT scanner can be implemented asdescribed above in relation to the optical scanners. For a threedimension system, a cardano suspension, as discussed in reference toFIG. 7, may be used to pivot the reflector in two dimensions.

FIG. 22 is a schematic diagram that illustrates scanning devicesaccording to embodiments of the present invention. In particular, anelectromagnetic radiation device 2200 has an organic light emittingdiode (LED) 2270 mounted thereon. The electromagnetic radiation device2200 is movably coupled to a member 2210 by a hinge (which is notshown). An IFA 2205 is configured to pivot the electromagnetic radiationdevice 2200 about the hinge in a plane of movement 2220 by contractingand expanding the IFA 2205. The organic LED 2270 generateselectromagnetic radiation which pivots as the electromagnetic radiationdevice 2200 pivots in the plane of movement 2220.

The reflectors described herein can be fabricated to focus theelectromagnetic radiation as well as reflect it. FIG. 23 is across-sectional view that illustrates embodiments of focusing reflectorsaccording to the present invention. In particular, a substrate 2300,such as polyimide, has a reflective layer 2365, such as a metal, formedthereon. An optically transparent layer 2370 is on the reflective layer2365. The optically transparent layer 2370 has a convex surface that isconfigured to face away from the reflective layer 2365. Electromagneticradiation 2375 passes through the optically transparent layer 2670 andreflects from the reflective layer 2365. The convex shape of theoptically transplant layer 2370 is configured to focus theelectromagnetic radiation 2375 reflected therefrom. Moreover, thereflector 2300 can be pivoted as discussed above, to scan theelectromagnetic radiation 2375 in a plane of movement to focus theelectromagnetic radiation on a target.

FIG. 24 is a cross-sectional view that illustrates focusing reflectors2400 according to embodiments of the present invention. In particular,the reflector 2400 includes a substrate 2460, such as a silicon, that isconfigured to have a concave shape. A reflective layer 2465 is on theconcave shaped surface of the substrate 2460. Electromagnetic radiation2475 is reflected from the reflective layer 2465 and is focused by theconcave shape of the reflective layer 2465.

FIGS. 25A and 25B are cross-sectional views that illustrate focusingreflectors 2500 according to embodiments of the present inventionincluding a flexible membrane 2585 that deflects to assume a concaveshape. In particular, as shown in FIG. 25A, a reflector 2500 includes asubstrate layer 2560 that is a electrically coupled to a voltage source2580. The flexible membrane 2585 is spaced apart from the substratelayer 2560 and has a reflective layer 2570 thereon that faces away fromthe substrate layer 2560. The flexible membrane 2585 is electricallycoupled to the voltage supply 2580. In operation, when little or novoltage is provided by the voltage supply 2580, the flexible membrane2585 assumes a planer shape as shown.

According to FIG. 25B, when the voltage supply 2580 generates anelectrostatic force sufficient to deflect the flexible membrane 2585,the flexible membrane 2585 deflects towards the substrate 2560 so thatthe flexible membrane 2585 assumes a concave shape that faces away fromthe substrate 2560.

Electromagnetic radiation 2575 reflects from the reflective surface 2570which is configured to focus electromagnetic radiation 2575 due to theconcave shape of the reflective layer 2570. Accordingly, a reflector2500 according to the present invention can provide a planer shapereflective layer to reflect electromagnetic radiation as well as aconcave shaped reflector to reflect and focus electromagnetic radiationdepending on the voltage provided to the reflector 2500.

In further embodiments according to the present invention, as shown inFIG. 26, the electromagnetic radiation device can be a lens 2600 throughwhich electromagnetic radiation is passed to focus the electromagneticradiation on a target 2695. Electromagnetic radiation 2675 is providedto a lens 2600. The electromagnetic radiation 2675 passes through thelens 2600 which is configured to focus the electromagnetic radiation ona target 2695. The lens 2600 can be mounted in an optical scanningsystem such as those described above, to pivot the lens 2600 using anIFA 2605 so that the electromagnetic radiation focused by the lens 2600can scan the target. The lens 2600 is coupled to the electromagneticradiation source 2675 and moves with the lens 2600 as the IFA pivots thelens 2600. In some embodiments according to the present invention, thelens 2600 is a Fresnel lens of hologram that is fabricated in silicon orpolymer using, for example, photolithography.

In further embodiments according to the present invention, theelectromagnetic radiation devices described in the embodiments hereincan be replaced by a second member that is moveably coupled to the firstmember and coupled together by an IFA. For example, FIG. 27 is aschematic diagram that illustrates embodiments according to the presentinvention. In particular, a first member 2710 is moveably coupled to asecond member 2700 by a hinge 2715. One end of an IFA 2705 is coupled toa first side of the first member 2710 and a second end of the IFA 2705is coupled to a first side of the second member 2700 as shown in FIG.27. The IFA 2705 is configured to expand and contract in directions 2715a and 2715 b to pivot the second member 2700 about the hinge 2715. Thehinge 2715 can be a flexion type hinge to allow the second member 2700to pivot about the hinge 2715 in a plane of movement 2720. Accordingly,the first and second members 2710, 2700 can function as an arm where thehinge 2015 functions as an elbow joint.

Furthermore, a third member 2730 can be moveably coupled to the firstmember 2710 by a second hinge 2735 that is configured to rotate in aplane of movement that is oriented out of the plane with respect to theplane of movement 2720. The second hinge 2735 provides the function of awrist joint between the second and third members 2710, 2730. The secondhinge can be a torsion type hinge.

The rotation for the third member 2730 can be provided by a second IFA(not shown) that coupled to the first and third members 2710, 2730. Oneend of the second IFA is coupled the first member 2710 at a pointthereof that is on a first side of the hinge. The other end of thesecond IFA is coupled to the third member 2730 at a point thereof thatis on a second side of the hinge that is opposite the first side. Forexample, in some embodiments where the second hinge is a torsion hingethat is rectangular, the second IFA is coupled to the first member 2710at a point thereon that is below the hinge. The other end of the secondIFA is coupled to the third member 2730 at a point thereon that is abovethe hinge.

In still further embodiments according to the present invention, asshown in FIG. 28A a first member 2800 is moveably coupled to a secondmember 2810 by a first hinge 2815. The first member 2800 is alsomoveably coupled to a third member 2850 by a second hinge 2816 that isadjacent to the first hinge 2815. One end of a first IFA 2805 is coupledto a first side of the first member 2800 and the other end of the firstIFA 2805 is coupled to a first side of the second member 2810. One endof a second IFA 2806 is coupled to a second side of the first member2800 that is opposite to the point where the first IFA 2805 is coupled.The other end of the second IFA 2806 is coupled to the third member2850.

The first and second IFAs 2805, 2806 are configured to expand andcontract in the directions 2825 a-b to pivot the second and thirdmembers 2810, 2850 about the hinges 2815, 2816 in a plane of movement2820. The first and second IFAs 2805, 2806 are configured to expand andcontract in cooperation with one another so that the second and thirdmembers 2810, 2850 can move in a flapping pattern.

FIG. 28B is a top view that illustrates embodiments of roboticstructures according to the present invention. As shown in FIG. 28B, afirst wing member 2870 a is moveably coupled to first and secondconnecting members 2875 a-b, by first and second binges 2871 a-b thatdefine a first axis 2871 a therethrough about which the first wingmember 2870 a pivots. A second wing member 2870 a is moveably coupled tothe first and second connecting members 2875 a-b by third and fourthhinges 2371 c-d that define a second axis 2871 b therethrough aboutwhich the second wing member 2870 b pivots. The hinges can be torsiontype binges. Other types of hinges can be used.

An anchor 2880 is coupled to the first and second wing members 2870 a-bby first and second IFAs 2885 a-b respectively. The first and secondIFAs 2885 a-b are coupled to the first and second wing members 2870 a-bat points thereon that are located between the anchor 2880 and the firstand seconds axes 287 a-b. According to FIG. 28B, the robotic structuresillustrated therein can be fabricated, for example, on silicon usingphotolithography and configured for operation as shown in FIG. 28C.

FIG. 28C is a schematic diagram that illustrates embodiments of roboticstructures according to the present invention. According to FIG. 28C,the anchor 2880 is positioned beneath the first and second wing members2870 a-b and the first and second connecting members 2875 a-b. Theanchor 2880 is coupled to first and second connecting members 2875 a-bby a frame 2890. The first and second IFAs 2885 a-b are configured toexpand and contract to pivot the first and second wing members 2870 a-bin the plane of movement 2873 a-b respectively. Accordingly, theembodiments according to the present invention illustrated by FIGS.28A-28C can provide robotic structures that may operate similar to abird's or insect's wings.

FIG. 28D is a schematic diagram that illustrates embodiments of roboticwing members according to the present invention. As shown in FIG. 28D, awing member 2893 is located in an interior region of a frame 2891 havingfirst and second opposing portions 2899 a-b. The wing member 2893 ismoveably coupled to the first and second opposing portions 2899 a-b ofthe frame 2891 by first and second hinges 2892 a-b respectively thatdefine an axis 2895 that passes therethrough. An IFA 2896 is coupled toa wing member 2893 at a portion thereof that is spaced apart from theaxis 2895. The IFA is configured to expand and contract in thedirections 2897 a-b respectively to pivot the wing member 2893 on thefirst and second hinges about the axis 2895.

It will be understood that the embodiments of robotic structuresaccording to the present invention illustrated in FIG. 28D can be usedas the wing members discussed above in reference to FIGS. 28B and 28C.Accordingly, embodiments of robotic structures according to the presentinvention can be configured to pivot in one plane of movement (forexample, an up and down flapping motion) and simultaneously pivot in asecond plane of movement such as the pivoting of the wing member 2893about the axis 2895.

FIG. 29A is a top view that illustrates embodiments according to thepresent invention. In particular, FIG. 29A shows a flexible substrate2900 having a first length. An IFA 2905 is on the flexible substrate2900 and has a first length L_(R) when the IFA 2905 IE is in a relaxedstate. When the IFA 2905 contracts to a contracted state, the IFA causesthe flexible substrate 2900 to arch as shown in FIG. 29B wherein thelength of the flexible substrate 2900 is reduced to L_(C). A latch 2910,or other such translation prevention member, is on a side of theflexible substrate 2900 and is configured to engage a surface 2930 whenthe IFA 2905 transitions from the contracted state to the relaxed state.For example, when the IFA 2905 is in the contacted state, the flexiblesubstrate 2900 and the IFA 2905 arch as shown in FIG. 29B. When the IFA2905 transitions to the relaxed state, the flexible substrate 2900 andthe IFA 2905 straighten causing the latch 2910 to engage the surface2930 thereby causing the structure to advance along the surface 2930 ina direction 2915 when the IFA 2905 transitions from the contracted stateto the relaxed state. In some embodiments according to the presentinvention, the latch 2910 can be a ratchet, a fish scale typearrangement commonly used on the underside of skis, mohair, or the like.Accordingly, the embodiments of robotic structures according to thepresent invention illustrated by FIGS. 29A and 29B can approximate acrawling movement.

FIG. 30 is a plan view that illustrates embodiments according to thepresent invention. In particular, a first member 3000 is moveablycoupled to a second member 3010 by a hinge 3005. A first IFA 3015 iscoupled to a first side of the first member 3000 and a first side of asecond member 3010. The IFA 3015 is configured to contract and expand inthe directions 3025 a-b thereby causing the second member 3010 to pivotabout the hinge 3005 in a plane of movement 3020. A second IFA 3016 iscoupled to the first and second members 3000, 3010 at points thereonwhich are opposite to the points where the first IFA 3015 is coupled tothe first and second members 3000, 3010. The first and second IFAs 3015,3016 are configured to alternately expand and contract thereby causingthe second member 3010 to pivot in a first direction in the plane ofmovement 3020 and then in a second direction opposite to the firstdirection in the plane of movement 3020. Accordingly, the embodiments ofrobotic structures according to the present invention illustrated byFIG. 30 can approximate a fishtail or swimming movement.

In the drawings and specification, there have been disclosed typicalpreferred embodiments of the invention and, although specific terms areemployed, they are used in a generic and descriptive sense only and notfor purposes of limitation, the scope of the invention being set forthin the following claims.

1. An optical scanner apparatus comprising: a member having spaced apartproximal and distal portions; an optical scanning device, configured todirect optical radiation, moveably coupled to the proximal portion ofthe member and configured to rotate in a plane of movement to a firstposition to direct the optical radiation along a first path andconfigured to rotate in the plane of movement to a second position todirect the optical radiation along a second path; and aMicroElectroMechanical Systems (MEMS) actuator coupled to the opticalscanning device, wherein the MEMS actuator is configured to move in afirst direction to move the optical scanning device to the firstposition and configured to move in a second direction to move theoptical scanning device to the second position; wherein the MEMSactuator has proximal and distal portions; and wherein the distalportion of the MEMS actuator is coupled to the proximal portion of themember and the proximal portion of the MEMS actuator is coupled to theoptical scanning device.
 2. A scanner apparatus according to claim 1further comprising: a hinge that moveably couples the optical scanningdevice to the proximal portion of the member, wherein the opticalscanning device pivots in the plane of movement about the hinge when theoptical scanning device is moved by the MEMS actuator.
 3. A scannerapparatus according to claim 2, wherein the hinge comprises one of atorsion hinge and a flexion hinge.
 4. A scanner apparatus according toclaim 2, wherein the hinge comprises polyimide.
 5. A scanner apparatusaccording to claim 1, wherein the optical scanning device comprises areflector, wherein the scanner apparatus further comprises: an opticalradiation source that projects optical radiation on the reflector,wherein the optical radiation source is selected from the listconsisting of a laser light source, a confocal microscope system, anultraviolet light source, an infrared light source, an image datasource, and an Alexandrite laser.
 6. A scanner apparatus according toclaim 1, wherein the optical scanning device comprises a reflector,wherein the scanner apparatus further comprises: an optical radiationsource that projects optical radiation on the reflector; and anultrasound source on the reflector that is configured to generateultrasonic radiation.
 7. A scanner apparatus according to claim 6,wherein the reflector comprises gold.
 8. A scanner apparatus accordingto claim 1, wherein the optical scanning device comprises a focusingreflector that reflects optical radiation projected thereon to directreflected optical radiation along a path, wherein the optical radiationis focused at a distance from the focusing reflector along the path. 9.A scanner apparatus according to claim 8, the focusing reflector furthercomprising: a substrate layer; a reflective layer on the substratelayer; and an optically transparent layer, on the reflective layer,having a convex surface configured to face away from the reflectivelayer, wherein the optical radiation passes through the opticallytransparent layer to the reflective layer and reflects from thereflective layer through the optically transparent layer along the path.10. A scanner apparatus according to claim 8, the focusing reflectorfurther comprising: a substrate layer having a concave surface; and areflective layer on the concave surface, wherein the optical radiationreflects from the reflective layer along the path.
 11. A scannerapparatus according to claim 8, the focusing reflector furthercomprising: a voltage supply that generates a voltage level; a substratelayer electrically coupled to the voltage supply; a flexible membranelayer spaced apart from the substrate layer and electrically coupled tothe voltage supply, wherein the flexible membrane is configured todeflect towards the substrate layer to assume a concave shape inresponse to the voltage level; and a reflective layer on the flexiblemembrane layer that is configured to reflect the optical radiation alongthe path.
 12. A scanner apparatus according to claim 1 wherein the MEMSactuator comprises an integrated force array actuator.
 13. A scannerapparatus comprising: a member having spaced apart proximal and distalportions; an electromagnetic radiation device, configured to directelectromagnetic radiation, moveably coupled to the member and configuredto move in a first plane of movement to a first position to direct theelectromagnetic radiation along a first path and configured to move inthe plane of movement to a second position to direct the electromagneticradiation along a second path; a MicroElectroMechanical Systems (MEMS)actuator coupled to the electromagnetic radiation device, wherein theMEMS actuator is configured to move in a first direction to move theelectromagnetic radiation device to the first position and configured tomove in a second direction to move the electromagnetic radiation deviceto the second position; and a flexion hinge that moveably couples theelectromagnetic radiation device to the member, wherein theelectromagnetic radiation device pivots in the plane of movement aboutthe hinge responsive to when the electromagnetic radiation device ismoved by the MEMS actuator.
 14. A scanner apparatus according to claim13, wherein the hinge moveably couples the electromagnetic radiationdevice to the proximal portion of the member.
 15. A scanner apparatusaccording to claim 13 wherein the MEMS actuator comprises an integratedforce array actuator.